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Apllications for MLase Excimer Lasers shown in a chart

MLI excimer lasers

The MLI series consists of excimer lasers with direct wavelength for industrial applications. We can, of course, adapt our basic devices to meet your individual requirements.

Individual components

MLI-200 / 500 / 1000 excimer lasers

MLase’s modern, compact MLI excimer lasers are UV light sources at wavelengths of 193 nm or 248 nm with high pulse energies of up to 16 mJ and pulse repetition frequencies of up to 1,000 Hz.

They are stand-alone devices with the longest service life and highest degree of reliability available on the market, combined with the lowest operating costs. Their homogeneous steel profile and energy stabilisation makes them highly suitable for demanding applications.

Our LC excimer laser systems are additionally capable of active water cooling (using domestic water or an external heat exchanger; no purified water) for stable continuous operation.

Seven Excimer Lasers on trolleys

MLI-200 / 500 / 1000 excimer lasers

ParameterArF
ArFArFKrF
KrF
KrF
Wavelength (nm)
193193193248248248
Pulse repetition frequency (Hz)
20050010002005001000
Stabilised pulse energy (mJ)
666101010
Stabilised average power (W)
1,23,06,02,05,010
Pulse stability (standard deviation %)
222222
Beam width (FWHM, VxHmm)
6×36×36×36×36×36×3
Beam divergence (FWHM, VxHmm)2×12×12×12×12×12×1
Pulse length
5-105-105-105-155-155-15
Datasheet download

MLI-500 / 1000 excimer lasers LC

Parameter
ArF
ArF
ArF
KrF
Wavelength (nm)
193193248248
Pulse repetition frequency (Hz)
50010005001000
Stabilised pulse energy (mJ)661010
Stabilised average power (W)
3,06,05,010
Pulse stability (standard deviation %)
2222
Beam width (FWHM, VxHmm)
6×36×36×36×3
Beam divergence (FWHM, VxHmm)
2×12×12×12×1
Pulse length
5-105-105-155-15
Datasheet Download
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