MLI excimer lasers
The MLI series consists of excimer lasers with direct wavelength for industrial applications. We can, of course, adapt our basic devices to meet your individual requirements.
Individual components
MLI-200 / 500 / 1000 excimer lasers
MLase’s modern, compact MLI excimer lasers are UV light sources at wavelengths of 193 nm or 248 nm with high pulse energies of up to 16 mJ and pulse repetition frequencies of up to 1,000 Hz.
They are stand-alone devices with the longest service life and highest degree of reliability available on the market, combined with the lowest operating costs. Their homogeneous steel profile and energy stabilisation makes them highly suitable for demanding applications.
Our LC excimer laser systems are additionally capable of active water cooling (using domestic water or an external heat exchanger; no purified water) for stable continuous operation.
MLI-200 / 500 / 1000 excimer lasers
| Parameter | ArF | ArF | ArF | KrF | KrF | KrF |
| Wavelength (nm) | 193 | 193 | 193 | 248 | 248 | 248 |
| Pulse repetition frequency (Hz) | 200 | 500 | 1000 | 200 | 500 | 1000 |
| Stabilised pulse energy (mJ) | 6 | 6 | 6 | 10 | 10 | 10 |
| Stabilised average power (W) | 1,2 | 3,0 | 6,0 | 2,0 | 5,0 | 10 |
| Pulse stability (standard deviation %) | 2 | 2 | 2 | 2 | 2 | 2 |
| Beam width (FWHM, VxHmm) | 6×3 | 6×3 | 6×3 | 6×3 | 6×3 | 6×3 |
| Beam divergence (FWHM, VxHmm) | 2×1 | 2×1 | 2×1 | 2×1 | 2×1 | 2×1 |
| Pulse length | 5-10 | 5-10 | 5-10 | 5-15 | 5-15 | 5-15 |
MLI-500 / 1000 excimer lasers LC
| Parameter | ArF | ArF | ArF | KrF |
| Wavelength (nm) | 193 | 193 | 248 | 248 |
| Pulse repetition frequency (Hz) | 500 | 1000 | 500 | 1000 |
| Stabilised pulse energy (mJ) | 6 | 6 | 10 | 10 |
| Stabilised average power (W) | 3,0 | 6,0 | 5,0 | 10 |
| Pulse stability (standard deviation %) | 2 | 2 | 2 | 2 |
| Beam width (FWHM, VxHmm) | 6×3 | 6×3 | 6×3 | 6×3 |
| Beam divergence (FWHM, VxHmm) | 2×1 | 2×1 | 2×1 | 2×1 |
| Pulse length | 5-10 | 5-10 | 5-15 | 5-15 |