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Standard Products & Configurations

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MLase Standard Products are industrial excimer lasers with clearly defined performance ranges and selectable system parameters.

They are designed for fast integration into production environments while maintaining flexibility within a controlled system architecture.

MLI Series – Industrial Excimer Lasers

MLase excimer lasers are designed as compact, high-stability systems with clearly specified operating parameters. Standardization of core performance characteristics enables reliable integration, predictable operation, and consistent results across different applications and environments. Typical system characteristics:

  • Pulse energies up to 16 mJ
  • Repetition rates up to 1000 Hz
  • High pulse stability below 2 %
  • Flexible cooling concepts
  • Continuous operation capabilities
  • Compact footprint

Beyond standard configuration, the MLI series can be tailored to specific integration requirements while preserving the validated core platform. Adaptation options typically include:

  • Optical components and beam path extensions
  • Mechanical integration and mounting concepts
  • Regional standards and customer-specific interfaces

All adaptations follow controlled implementation guidelines, ensuring that system performance, reliability, and long-term stability remain unaffected.

Find your Standard Excimer Laser

Wavelength
Optics

193 nm (ArF)
248 nm (KrF)
248 nm for FBG (KrFFBG)

Maximum
Frequency

200 Hz
500 Hz
1000 Hz

Power
Setting

Standard Power (SP)
High Power (HP)

Cooling
Concept

Air Cooled (AC)
Liquid Cooled (LC)

Model nameGas / OpticsWavelengthMax. Repetition RateStabilized EnergyMaximum Energy (mJ)Energy Stability (sigma)**CoolingDuty CyclePulse Duration (fwhm)Beam Dimensions (typical at fwhm, V x H)Beam Divergence (typical at fwhm, V x H)WeightHousingDimensions (L x W x H)
MLI-ArF-200-SP-ACArF193 nm200 Hz6 mJ9 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-200-SP-LCArF193 nm200 Hz6 mJ9 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-ArF-200-HP-ACArF193 nm200 Hz8 mJ12 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-200-HP-LCArF193 nm200 Hz8 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-ArF-500-SP-ACArF193 nm500 Hz6 mJ9 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-500-SP-LCArF193 nm500 Hz6 mJ9 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-ArF-500-HP-ACArF193 nm500 Hz8 mJ12 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-500-HP-LCArF193 nm500 Hz8 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-ArF-1000-SP-ACArF193 nm1000 Hz6 mJ9 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-1000-SP-LCArF193 nm1000 Hz6 mJ9 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-ArF-1000-HP-ACArF193 nm1000 Hz8 mJ12 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-ArF-1000-HP-LCArF193 nm1000 Hz8 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-200-SP-ACKrF248 nm200 Hz7 mJ12 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-200-SP-LCKrF248 nm200 Hz7 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-200-HP-ACKrF248 nm200 Hz12 mJ16 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-200-HP-LCKrF248 nm200 Hz12 mJ16 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-500-SP-ACKrF248 nm500 Hz7 mJ12 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-500-SP-LCKrF248 nm500 Hz7 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-500-HP-ACKrF248 nm500 Hz12 mJ16 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-500-HP-LCKrF248 nm500 Hz12 mJ16 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-1000-SP-ACKrF248 nm1000 Hz7 mJ12 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-1000-SP-LCKrF248 nm1000 Hz7 mJ12 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrF-1000-HP-ACKrF248 nm1000 Hz12 mJ16 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrF-1000-HP-LCKrF248 nm1000 Hz12 mJ16 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75 kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-200-SP-ACKrF, FBG optics248 nm200 Hz5 mJ10 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-200-SP-LCKrF, FBG optics248 nm200 Hz5 mJ10 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-200-HP-ACKrF, FBG optics248 nm200 Hz10 mJ14 mJ<2%Air100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-200-HP-LCKrF, FBG optics248 nm200 Hz10 mJ14 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-500-SP-ACKrF, FBG optics248 nm500 Hz5 mJ10 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-500-SP-LCKrF, FBG optics248 nm500 Hz5 mJ10 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-500-HP-ACKrF, FBG optics248 nm500 Hz10 mJ14 mJ<2%Air40%, max. 10 min on5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-500-HP-LCKrF, FBG optics248 nm500 Hz10 mJ14 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-1000-SP-ACKrF, FBG optics248 nm1000 Hz5 mJ10 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-1000-SP-LCKrF, FBG optics248 nm1000 Hz5 mJ10 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³
MLI-KrFFBG-1000-HP-ACKrF, FBG optics248 nm1000 Hz10 mJ14 mJ<2%Air20%, max. 5 min on5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 315 x 445 mm³
MLI-KrFFBG-1000-HP-LCKrF, FBG optics248 nm1000 Hz10 mJ14 mJ<2%Water100%5..10 ns6x3 mm2x1 mrad75kgStainless Steel, IP20560 x 355 x 445 mm³

*Specifications are subject to change without notice | ** <2% (E ≥ stabilized pulse Energy)

MLI-ArF Models
Datasheet
MLI-KrF Models
Datasheet
MLI-KrFFBG Models
Datasheet
ISO 13485

Our Commitment to Quality

MLase operates as a medical device manufacturer with a quality management system certified according to ISO 13485/ EN ISO 13485. Our products are developed and manufactured to meet the highest standards of performance, reliability, and quality.

This commitment ensures that our excimer laser systems support safe and dependable operation in demanding medical applications.

Quality Management

Application Areas

Check out the wide range of applications using MLase MLI-Series Standard Excimer Lasers

Contact Us

Ready to talk about your application needs? Get in contact with our sales team or one of our trained authorized partners.

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