Industrial applications are highly diverse. We support them through a modular system to meet all individual requirements. We are happy to configure your laser according to your needs – depending on wavelength (193nm, 248nm, 308nm), with or without water cooling, and with pulse repetition rates currently up to 1 kHz.
Depending on the configuration (with or without water cooling), they are very compact, with dimensions of 560mm x 355mm x 445mm (w/o protruding parts).
We are happy to also supply the appropriate gas supply system for you.
Typical industrial applications of these excimer lasers include:
- Writing of fiber Bragg gratings (FBG)
- Optical inspection and metrology such as testing micro-optics
- Laser structuring and scribing
- Micromachining of materials such as ceramics, metals, or plastics
- Laser ablation/pulsed laser deposition (PLD, ICP-MS)
- In semiconductor manufacturing for inspecting masks or direct wafer processing
In continuous operation applications, our lasers have proven to be especially robust. We guarantee several hundred million laser pulses before optics replacement is required.